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1

A thickness model for the TiSi2TiN stack in the titanium salicide process module

Jiunn-Yann Tsai, Pushkar Apte

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 692 KB

english, 1995

2

Apte, Pushkar, Bottoms, W.R., Chen, William, Scalise, George

Journal:

Year:

2011

Language:

english

File:

PDF, 2.44 MB

english, 2011

3

[IEEE International Conference on Computational Intelligence and Multimedia Applications (ICCIMA 2007) - Sivakasi, Tamil Nadu, India (2007.12.13-2007.12.15)] International Conference on Computational Intelligence and Multimedia Applications (ICCIMA 2007) - Adaptive Fuzzy Watermarking for 3D Models

Motwani, Mukesh, Beke, Nikhil, Bhoite, Abhijit, Apte, Pushkar, Harris, Frederick C.

Year:

2007

Language:

english

File:

PDF, 548 KB

english, 2007

4

The Recession's Silver Lining

Apte, Pushkar, Scalise, George

Journal:

Year:

2009

Language:

english

File:

PDF, 1.61 MB

english, 2009

5

Constant Current Stress Breakdown in Ultrathin SiO[sub 2] Films

Apte, Pushkar P.

Journal:

Journal of The Electrochemical Society

Year:

1993

Language:

english

File:

PDF, 462 KB

english, 1993

6

A Model for Low-Resistivity TiSi2 Formation on Narrow Polysilicon Lines.

Apte, Pushkar P., Pollack, Gordon

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 1.05 MB

english, 1994

7

Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning

Apte, Pushkar P., Venkatraman, Ramnath, Saraswat, Krishna C., Moslehi, Mehrdad M., Yeakley, Richard

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 2.58 MB

english, 1991

8

Thermally Driven In-Situ Removal of Native Oxide Using Anhydrous Hydrogen Fluoride

Apte, Pushkar P., Park, Heungsoo, Saraswat, Krishna C., Helms, C. R.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 1.57 MB

english, 1993

9

Process Modeling and Integration of The Salicide Process Module for Sub-Half Micron Technology.

Apte, Pushkar P., Prinslow, Douglas A., Kittl, Jorge A., list, R. Scott, Pollack, Gordon

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 1.37 MB

english, 1995

10

Process Design & Integration of Salicide and Source/Drain process Modules for Improved Device Performance

Apte, Pushkar P., Saxena, Shared, Rao, Suraj, Vasanth, Karthik, Prinslow, Douglas A., Kittl, Jorge A., Breedijk, Terence, Pollack, Gordon

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 519 KB

english, 1998

11

Process Design & Integration of Salicide and Source/Drain Process Modules for Improved Device Performance

Apte, Pushkar P., Saxena, Sharad, Rao, Suraj, Vasanth, Karthik, Prinslow, Douglas A., Kittl, Jorge A., Breedijk, Terence, Pollack, Gordon

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 1.24 MB

english, 1998

12

Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor

Apte, Pushkar P., Wood, Samuel, Booth, Len, Saraswat, Krishna C., Moslehi, Mehrdad M.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 1.25 MB

english, 1991

13

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Pyrometer modeling for rapid thermal processing

Wood, Samuel C., Apte, Pushkar P., King, Tsu-Jae, Moslehi, Mehrdad M., Saraswat, Krishna C., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 579 KB

english, 1991

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